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| 1 motorola sensor device data " " !!# ! " "# !" " the MPX4080d series piezoresistive transducer is a stateoftheart monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with a/d inputs. this patented, single element transducer c ombines advanced micromachining techniques, thinfilm metalliza- tion, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. features ? 3.0% maximum error over 0 to 85 c ? ideally suited for microprocessor or microcontrollerbased systems ? temperature compensated from 40 to 105 c ? easytouse, durable epoxy unibody package figure 1 shows a block diagram of the internal circuitry integrated on the pressure sensor chip. ( % %!% ! !& ! & ! & #$&'$ " #!%& "! ! ! %& ! %& ! $"'! $$! % & $' &$+ # !% ! $ !" "!!&% figure 1. fully integrated pressure sensor schematic ( 5:9 order this document by MPX4080d/d semiconductor technical data ? motorola, inc. 2002 integrated pressure sensor 0 to 80 kpa (0 to 11.6 psi) 0.58 to 4.9 volts output note: pin 1 is the notched pin. pin number note: pins 4, 5, and 6 are internal device connections. do not connect to external circuitry or ground. pin 1 is noted by the notch in the lead. MPX4080d case 867 1 2 3 v out gnd v s 4 5 6 n/c n/c n/c unibody package rev 1 f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 2 motorola sensor device data maximum ratings (note) parametrics symbol value unit maximum pressure (p1 > p2) (p2 > p1) p max 400 400 kpa storage temperature t stg 40 to +125 c note: exposure beyond the specified limits may cause permanent damage or degradation to the device. operating characteristics (v s = 5.1 vdc, t a = 25 c unless otherwise noted, p1 > p2. decoupling circuit shown in figure 4 required to meet electrical specifications.) characteristic symbol min typ max unit pressure range (1) p op 0 e 80 kpa supply voltage (2) v s 4.85 5.1 5.35 vdc supply current i o e 7.0 10 madc minimum pressure offset (3) (0 to 85 c) @ v s = 5.1 volts v off 0.478 0.575 0.672 vdc full scale output (4) (0 to 85 c) @ v s = 5.1 volts v fso 4.772 4.900 5.020 vdc full scale span (5) (0 to 85 c) @ v s = 5.1 volts v fss e 4.325 e vdc accuracy (6) e e e 3.0 %v fss sensitivity v/p e 54 e mv/kpa notes: 1. 1.0kpa (kilopascal) equals 0.145 psi. 2. device is ratiometric within this specified excitation range. 3. offset (v off ) is defined as the output voltage at the minimum rated pressure. 4. full scale output (v fso ) is defined as the output voltage at the maximum or full rated pressure. 5. full scale span (v fss ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. accuracy (error budget) consists of the following: ? linearity: output deviation from a straight line relationship with pressure over the specified pressure range. ? temperature hysteresis: output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. ? pressure hysteresis: output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25 c. ? tcspan: output deviation over the temperature range of 0 to 85 c, relative to 25 c. ? tcoffset: output deviation with minimum pressure applied, over the temperature range of 0 to 85 c, relative to 25 c. ? variation from nominal: the variation from nominal values, for offset or full scale span, as a percent of v fss at 25 c. f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 3 motorola sensor device data onchip temperature compensation, calibration and signal conditioning figure 2. output versus pressure differential figure 2 shows the sensor output signal relative to differential pressure input. typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85 c using the decoupling circuit shown in figure 4. the output will saturate out- side of the specified pressure range. "'&#'&( #$%%'$ 2#, &+# * ! ( % (.- & #* %#!$! &+# "'&#'&$! &+# "%& &+# '"$" % "! "& ) $ "! $ %& ! %% %& & "($ #"*+ # %& % $!& ' !& "! figure 3. crosssectional diagrams (not to scale) figure 3 illustrates the differential sensing chip in the basic chip carrier (case 867). a fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor dia- phragm. the MPX4080d pressure sensor operating character- istics, internal reliability, and qualification tests are based on use of dry air as the pressure media. media, other than dry air, may have adverse effects on sensor perfor- mance and longterm reliability. contact the factory for information regarding media compatibility in your applica- tion. figure 4 shows the recommended decoupling circuit for in- terfacing the output of the integrated sensor to the a/d input of a microprocessor or microcontroller. proper decoupling of the power supply is recommended. figure 4. recommended power supply decoupling and output filtering. for additional output filtering, please refer to application note an1646. #% 6 "'&#'& (8 ( ! (5:9 f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 4 motorola sensor device data nominal transfer value: v out = v s (p x 0.01059 + 0.11280) +/ (pressure error x temp. mult. x 0.01059 x v s ) v s = 5.1 v 0.25v p kpa transfer function (MPX4080d) temperature error multiplier 7/,2 #51498 &/36/7,9:7/ 14 MPX4080d pressure error band #7/88:7/ 14 2#, #7/88:7/ 7757 3,; 95 2#, 2#, 95 2#, 2#, 95 2#, 2#, 95 note: the temperature multiplier is a linear response from 0 to 40 c and from 85 to 105 c. 77572#, 7757 13198 057 #7/88:7/ MPX4080d f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 5 motorola sensor device data pressure (p1)/vacuum (p2) side identification table motorola designates the two sides of the pressure sensor as the pressure (p1) side and the vacuum (p2) side. the pressure (p1) side is the side containing fluoro silicone gel which protects the die from harsh media. the motorola pres- sure sensor is designed to operate with positive differential pressure applied, p1 > p2. the pressure (p1) side is identified by the stainless steel cap. ordering information: the MPX4080d is available only in the unibody package. device order no device type case no device marking device order no. device type case no. device marking MPX4080d differential 867 MPX4080d f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 6 motorola sensor device data package dimensions basic element case 86708 issue n %&+ # ! ("'& $"'! ( ( ( (* pin 1 f g n l r c b m j s !"&% !% "! ! ! &" $! ! #$ !% + "!&$" ! !% "! ! !% "! % ! '% ( " & " %&"# $ ! " %&"# $ ! !"& &" * a 6 pl d t & % % !" !" %&+ # ! "#! $"'! ("'& (%'## + ("'& "#! %&+ # ! "#! $"'! ("'& (%'## + ("'& "#! positive pressure (p1) f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 7 motorola sensor device data notes f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . 8 motorola sensor device data motorola reserves the right to make changes without further notice to any products herein. motorola makes no warranty, represe ntation or guarantee regarding the suitability of its products for any particular purpose, nor does motorola assume any liability arising out of the applicati on or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. atypicalo parameters which may be provided in motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. all operatin g parameters, including at ypicalso must be validated for each customer application by customer's technical experts. motorola does not convey any license under it s patent rights nor the rights of others. motorola products are not designed, intended, or authorized for use as components in systems intended for surgical imp lant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the motorola product could create a s ituation where personal injury or death may occur. should buyer purchase or use motorola products for any such unintended or unauthorized application, buyer shall indemnify and hold motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expens es, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized u se, even if such claim alleges that motorola was negligent regarding the design or manufacture of the part. motorola, inc. motorola, inc. is an equal opportunity/a ffirmative action employer. motorola and the logo are registered in the us patent & trademark office. all other product or service names are the property of t heir respective owners. motorola, inc. 2001. how to reach us: usa/europe/locations not listed : motorola literature distribution; p.o. box 5405, denver, colorado 80217. 13036752140 or 18004412447 japan : motorola japan ltd.; sps, technical information center, 3201, minamiaz abu. minatoku, tokyo 1068573 japan. 8 1334403569 asia/pacific : motorola semiconductors h.k. ltd.; silicon harbour centre, 2 dai king street, tai po industrial estate, tai po, n.t., hong ko ng. 85226668334 technical information center: 18005216274 home page : http://www.motorola.com/semiconductors/ MPX4080d/d ? f r e e s c a l e s e m i c o n d u c t o r , i freescale semiconductor, inc. f o r m o r e i n f o r m a t i o n o n t h i s p r o d u c t , g o t o : w w w . f r e e s c a l e . c o m n c . . . |
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